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John Wiley & Sons Inc

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High‐quality GaN film and AlGaN/GaN HEMT grown on 4‐inch Si(110) substrates by MOCVD using an ultra‐thin AlN/GaN superlattice interlayer

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John Wiley & Sons Inc

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Stress, porosity measurements and corrosion behaviour of AlN films deposited on steel substrates

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Preparation of highly oriented AlN thin films on glass substrates by helicon plasma sputtering and design of experiments

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Growth of AlN on lattice-matched MnO substrates by pulsed laser deposition

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