Heteroepitaxial growth of GaAs films on Si substrates using ion beams, neutral molecular beams, and their mixtures

Author: Yokota K.   Tamura S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.349, Iss.1, 1999-07, pp. : 84-92

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Abstract