Transport mechanisms of RF sputtered Al-doped ZnO films by H 2 process gas dilution

Author: Addonizio M.L.   Antonaia A.   Cantele G.   Privato C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.349, Iss.1, 1999-07, pp. : 93-99

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Abstract