Heteroepitaxial growth of SiGe films and heavy B doping by ion-beam sputtering

Author: Sasaki K.   Nabetani Y.   Miyashita H.   Hata T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 171-174

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Abstract