Gas pressures influence on the optical and mechanical properties of Ta 2 O 5 films produced by reactive low voltage ion plating (RLVIP)

Author: Strauss G.N.   Lechner W.   Pulker H.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.351, Iss.1, 1999-08, pp. : 53-56

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Abstract