Electrical properties of Ta 2 O 5 thin films deposited on Cu

By Ezhilvalavan S.   Tseng T.-Y.  

Thin Solid Films, Vol. 360, Iss. 1, 2000-02 ,pp. : 268-273

Elsevier

Access to resources Recommend Favorite

Optical and structural properties of dense SiO 2 , Ta 2 O 5 and Nb 2 O 5 thin-films deposited by indirectly reactive sputtering technique

By Song Y.   Sakurai T.   Maruta K.   Matusita A.   Matsumoto S.   Saisho S.   Kikuchi K.  

Vacuum, Vol. 59, Iss. 2, 2000-11 ,pp. : 755-763

Elsevier

Access to resources Recommend Favorite

High-reflectivity Bragg gratings fabricated by 248-nm excimer laser holographic ablation in thin Ta₂O₅ films overlaid on glass waveguides

By Pissadakis S.   Zervas M.N.   Reekie L.   Wilkinson J.S.  

Applied Physics A, Vol. 79, Iss. 4-6, 2004-09 ,pp. : 1093-1096

Springer Publishing Company

Access to resources Recommend Favorite

Optical properties of Ta 2 O 5 thin films deposited using the spin coating process

By Ghodsi F.E.   Tepehan F.Z.   Tepehan G.G.  

Thin Solid Films, Vol. 295, Iss. 1, 1997-02 ,pp. : 11-15

Elsevier

Access to resources Recommend Favorite

Annealing ultra thin Ta 2 O 5 films deposited on bare and nitrogen passivated Si(100)

By Mao A.Y.   Son K.-A.   Hess D.A.   Brown L.A.   White J.M.   Kwong D.L.   Roberts D.A.   Vrtis R.N.  

Thin Solid Films, Vol. 349, Iss. 1, 1999-07 ,pp. : 230-237

Elsevier

Access to resources Recommend Favorite