Investigation of borophosphosilicate glass roughness and planarization with the atomic force microscope technique

Author： Tang S.K.   Vassiliev V.Y.   Mridha S.   Chan L.H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.352, Iss.1, 1999-09, pp. : 77-84

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