A self-ion assisted beam (SIAB) source based upon unvala electron beam scheme

Author: Choi W.-K.   Song J.-H.   Kim K.-H.   Lee C.-M.   Choi S.-C.   Song J.-H.   Jung H.-J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 29-33

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Abstract