Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si

Author: Stangl J.   Holy V.   Grim J.   Bauer G.   Zhu J.   Brunner K.   Abstreiter G.   Kienzle O.   Ernst F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.357, Iss.1, 1999-12, pp. : 71-75

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Abstract