Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometry

Author: Monaghan M.L.   Nigam T.   Houssa M.   De Gendt S.   Urbach H.P.   de Bokx P.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.359, Iss.2, 2000-01, pp. : 197-202

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Abstract