Effects of deposition parameters on the crystallinity of CeO 2 thin films deposited on Si(100) substrates by r.f.-magnetron sputtering

Author: Kim L.   Kim J.   Jung D.   Park C.-Y.   Yang C.-W.   Roh Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.360, Iss.1, 2000-02, pp. : 154-158

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Abstract