Effects of rapid thermal process on structural and electrical characteristics of Y 2 O 3 thin films by r.f.-magnetron sputtering

Author： Horng R.H. Wuu D.S. Yu J.W. Kung C.Y.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 234-237

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