In situ monitoring of ZnS/GaP and ZnSe/GaAs metalorganic vapor phase epitaxy using reflectance anisotropy spectroscopy and spectroscopic ellipsometry

Author: Meyne C.   Gensch M.   Peters S.   Pohl U.W.   Zettler J.-T.   Richter W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.364, Iss.1, 2000-03, pp. : 12-15

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Abstract