Ultra low energy SIMS, XTEM and X-ray diffraction methods for the characterization of a MBE grown short period (Si n Ge m ) 16 superlattices

Author: Mironov O.A.   Fulgoni D.J.F.   Parry C.P.   Cooke G.A.   Dowsett M.G.   Parker E.H.C.   Chtcherbatchev K.D.   Bassas J.M.   Romano-Rodriguez A.   Perez-Rodriguez A.   Morante J.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.367, Iss.1, 2000-05, pp. : 176-179

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Abstract