The optical and structural properties of AlN thin films characterized by spectroscopic ellipsometry

Author: Joo H.Y.   Kim H.J.   Kim S.J.   Kim S.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.368, Iss.1, 2000-06, pp. : 67-73

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract