Optical properties of amorphous and polycrystalline tantalum oxide thin films measured by spectroscopic ellipsometry from 0.03 to 8.5 eV

Author： Franke E.   Schubert M.   Trimble C.L.   DeVries M.J.   Woollam J.A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.388, Iss.1, 2001-06, pp. : 283-289

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