Effects at reactive ion etching of CVD diamond

Author: Bello I.   Fung M.K.   Zhang W.J.   Lai K.H.   Wang Y.M.   Zhou Z.F.   Yu R.K.W.   Lee C.S.   Lee S.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.368, Iss.2, 2000-06, pp. : 222-226

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Abstract