fabrication of diamond membranes for MEMS using reactive ion etching of silicon

Author: Ramesham R.   Ellis C.D.   Olivas J.D.   Bolin S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.330, Iss.2, 1998-09, pp. : 62-66

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Abstract