Characterization of SiGeC thin films by MeV ion scattering and X-ray diffraction

Author: Nagaki M.   Narusawa T.   Hiraki A.   Saitoh T.   Kubo M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 143-147

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract