Low-temperature growth of in situ phosphorus-doped silicon films: two-step growth utilizing amorphous silicon buffers

Author: Shim K.-H.   Kim H.-S.   Lee J.-Y.   Kang J.-Y.   Song M.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 185-188

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Abstract