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By Tillack B.  

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Atomic layer doping of SiGe by low pressure (rapid thermal) chemical vapor deposition

By Tillack B.   Kruger D.   Gaworzewski P.   Ritter G.  

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Experimental study of a surfactant-assisted SiGe graded layer and a symmetrically strained Si/Ge superlattice for thermoelectric applications

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Characterization of SiGe base layer in Si/SiGe heterojunction bipolar transistor layer structure

By Zhang J.   Jin X.   Tsien P.-H.   Lo T.-C.  

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Formation of thin gate oxides on SiGe with atomic oxygen

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