Author: Huang J.S. Oates A.S. Zhao J.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.371, Iss.1, 2000-08, pp. : 310-315
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Effect of cracks in TiN anti-reflection coating layers on early via electromigration failure
By Huang J.S. Oates A.S. Zhao J.
Thin Solid Films, Vol. 365, Iss. 1, 2000-04 ,pp. :
On the existence of superstructure in TiN x thin films
By Zerkout S. Achour S. Mosser A. Tabet N.
Thin Solid Films, Vol. 441, Iss. 1, 2003-09 ,pp. :
Growth and mechanical anisotropy of TiN thin films
Thin Solid Films, Vol. 271, Iss. 1, 1995-12 ,pp. :