Effect of cracks in TiN anti-reflection coating layers on early via electromigration failure - [Thin Solid Films 365 (2000) 110-115]

Author: Huang J.S.   Oates A.S.   Zhao J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.371, Iss.1, 2000-08, pp. : 310-315

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Abstract