

Author: Wuu D.S. Chan C.C. Horng R.H.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.373, Iss.1, 2000-09, pp. : 84-88
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content




Raman spectroscopy analysis of magnetron sputtered RuO 2 thin films
By Meng L.-j. Teixeira V. dos Santos M.P.
Thin Solid Films, Vol. 442, Iss. 1, 2003-10 ,pp. :


Microstructural and electrical characteristics of reactively sputtered Ta-N thin films
By Chang C.-C. Jeng J.S. Chen J.S.
Thin Solid Films, Vol. 413, Iss. 1, 2002-06 ,pp. :


A study of residual stress on rf reactively sputtered RuO 2 thin films
Thin Solid Films, Vol. 375, Iss. 1, 2000-10 ,pp. :


Material characteristics and electrical property of reactively sputtered RuO 2 thin films
Thin Solid Films, Vol. 382, Iss. 1, 2001-02 ,pp. :