Raman spectroscopy analysis of magnetron sputtered RuO 2 thin films

Author: Meng L.-j.   Teixeira V.   dos Santos M.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.442, Iss.1, 2003-10, pp. : 93-97

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Abstract