Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma

Author: Suda Y.   Nishimura T.   Ono T.   Akazawa M.   Sakai Y.   Homma N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.374, Iss.2, 2000-10, pp. : 287-290

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Abstract