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Elsevier

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A Cat-CVD Si 3 N 4 film study and its application to the ULSI process

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Application of decomposed species generated by a heated catalyzer to ULSI fabrication processes

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Peptide-lipid interactions in Langmuir monolayers at the air/water interface. A novel thermodynamic analysis of a two-component surfactant system

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A ULSI shallow trench isolation process through the integration of multilayered dielectric process and chemical-mechanical planarization

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