Degradation of hydrogenated amorphous silicon passivation films caused by sputtering deposition

E-ISSN： 1862-6319|212|8|1817-1822

ISSN： 1862-6300

Source： PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.8, 2015-08, pp. : 1817-1822

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