Closed-chamber CVD - a new method for preparation of group-IV thin films for large area electronics

Author: Koynov S.   Tzolov M.   Brogueira P.   Schwarz R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 206-208

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Abstract