Preparation of WSI 2 by rapid thermal annealing of CVD thin films of tungsten

Author: Gesheva K.A.   Gogova D.S.   Beshkov G.D.   Popov V.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.51, Iss.2, 1998-10, pp. : 181-184

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Abstract