Synthesis and structural properties of Al&unknown;C&unknown;N&unknown;O composite thin films

Author: Ning J.   Xu S.   Ostrikov K.N.   Jianwei C.   Yinan L.   Mei Ling K.   Lee S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.385, Iss.1, 2001-04, pp. : 55-60

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