Characterization of multilayer films of Ti&unknown;Al&unknown;O&unknown;C&unknown;N system prepared by pulsed d.c. plasma-enhanced chemical vapor deposition

Author： Kawata K.   Sugimura H.   Takai O.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.390, Iss.1, 2001-06, pp. : 64-69

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