Transmission electron microscopy study of Ni silicides formed during metal-induced silicon growth

Author: Guliants E.A.   Anderson W.A.   Guo L.P.   Guliants V.V.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.385, Iss.1, 2001-04, pp. : 74-80

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Abstract