Author: Kho J.-G. Moon K.-T. Nouet G. Ruterana P. Kim D.-P.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 78-83
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
The growth of hexagonal boron nitride thin films on silicon using single source precursor
Thin Solid Films, Vol. 322, Iss. 1, 1998-06 ,pp. :
Growth process of cubic boron nitride films in bias sputter deposition
By Yamada Y. Tatebayashi Y. Tsuda O. Yoshida T.
Thin Solid Films, Vol. 295, Iss. 1, 1997-02 ,pp. :
Zinc oxide films prepared by sol-gel spin-coating
Thin Solid Films, Vol. 372, Iss. 1, 2000-09 ,pp. :