A new class of Ti&unknown;Si&unknown;C&unknown;N coatings obtained by chemical vapor deposition, Part 1: 1000 o C Process

Author： Kuo D.-H. Huang K.-W.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.394, Iss.1, 2001-08, pp. : 71-79

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