A new class of Ti-Si-C-N coatings obtained by chemical vapor deposition - part II: low-temperature process

Author: Kuo D.-H.   Huang K.-W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.394, Iss.1, 2001-08, pp. : 80-88

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Abstract