Influence of atomic hydrogen on the growth kinetics of a-Si:H films and on the properties of silicon substrates

Author: Seitz H.   Bauer S.   Dusane R.O.   Schroder B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 116-120

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Abstract