Study of the secondary-electron emission from thermally grown SiO 2 films on Si

Author: Yi W.   Jeong T.   Yu S.   Lee J.   Jin S.   Heo J.   Kim J.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.397, Iss.1, 2001-10, pp. : 170-175

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Abstract