Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry

Author: Tikhonravov A.V.   Trubetskov M.K.   Krasilnikova A.V.   Masetti E.   Duparre A.   Quesnel E.   Ristau D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.397, Iss.1, 2001-10, pp. : 229-237

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Abstract