Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy

Author： Petrik P. Biro L.P. Fried M. Lohner T. Berger R. Schneider C. Gyulai J. Ryssel H.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 186-191

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