Spectroscopic ellipsometry on silicon-oxide films on silicon

By Jungk G.   Grabolla T.  

Thin Solid Films, Vol. 335, Iss. 1, 1998-11 ,pp. : 253-257

Elsevier

Access to resources Recommend Favorite

Optical properties of amorphous and polycrystalline tantalum oxide thin films measured by spectroscopic ellipsometry from 0.03 to 8.5 eV

By Franke E.   Schubert M.   Trimble C.L.   DeVries M.J.   Woollam J.A.  

Thin Solid Films, Vol. 388, Iss. 1, 2001-06 ,pp. : 283-289

Elsevier

Access to resources Recommend Favorite

Annealing effects on silicon-rich oxide films studied by spectroscopic ellipsometry

By Spiga S.   Tallarida G.   Borghesi A.   Sassella A.   De Santi G.  

Thin Solid Films, Vol. 325, Iss. 1, 1998-07 ,pp. : 36-41

Elsevier

Access to resources Recommend Favorite

Optical properties of nanophase films measured by variable-angle spectroscopic ellipsometry

By Urban F.K.   Hosseini-Tehrani A.   Khabari A.   Griffiths P.   Bungay C.   Petrov I.   Kim Y.  

Thin Solid Films, Vol. 408, Iss. 1, 2002-04 ,pp. : 211-217

Elsevier

Access to resources Recommend Favorite

The optical and structural properties of AlN thin films characterized by spectroscopic ellipsometry

By Joo H.Y.   Kim H.J.   Kim S.J.   Kim S.Y.  

Thin Solid Films, Vol. 368, Iss. 1, 2000-06 ,pp. : 67-73

Elsevier

Access to resources Recommend Favorite