Surface roughness reducing effect of iodine sources (CH 3 I, C 2 H 5 I) on Ru and RuO 2 composite films grown by MOCVD

Author： Kim J.J.   Jung D.H.   Kim M.S.   Kim S.H.   Yoon D.Y.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.409, Iss.1, 2002-04, pp. : 28-32

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