New control method for low temperature deposition limit of metal-organic chemical vapor deposition (MOCVD) by the introduction of organic vapor-application to ZrO 2 film preparation

Author: Higashi N.   Murakami Y.   Machida H.   Seki S.   Sawada Y.   Funakubo H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.409, Iss.1, 2002-04, pp. : 23-27

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract