Investigation of an upflow cold-wall CVD reactor by gas phase Raman spectroscopy

Author: Park C.   Yeon Hwang J.   Huang M.   Anderson T.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.409, Iss.1, 2002-04, pp. : 88-97

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Abstract