RF-magnetron-sputtered heteroepitaxial YSZ and CeO 2 /YSZ/Si(001) thin films with improved capacitance-voltage characteristics

Author： Wakiya N.   Yoshida M.   Kiguchi T.   Shinozaki K.   Mizutani N.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.411, Iss.2, 2002-05, pp. : 268-273

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