Local structure and bonds of amorphous silicon oxynitride thin films

Author: Scopel W.L.   Fantini M.C.A.   Alayo M.I.   Pereyra I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.413, Iss.1, 2002-06, pp. : 59-64

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Abstract