Defects in silicon oxynitride films

Author: Futatsudera M.   Kimura T.   Matsumoto A.   Inokuma T.   Kurata Y.   Hasegawa S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.424, Iss.1, 2003-01, pp. : 148-151

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Abstract