Influence of nitrogen doping on different properties of a-C:H

By Hauert R.   Glisenti A.   Metin S.   Goitia J.   Kaufman J.H.   Van Loosdrecht P.H.M.   Kellock A.   Hoffmann P.   White R.L.   Hermsmeier B.D.   Kellock A.J.  

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Optical emission end point detecting for monitoring oxygen plasma a-C:H stripping

By Cescato L.   Alves M.A.R.   Da Silva Braga E.   Fissore A.  

Vacuum, Vol. 49, Iss. 3, 1998-03 ,pp. : 213-215

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Effect of annealing on the structural and electrical properties of d.c. multipolar plasma deposited a-C:H films

By Clin M.   Benlahsen M.   Zeinert A.   Zellama K.   Naud C.  

Thin Solid Films, Vol. 372, Iss. 1, 2000-09 ,pp. : 60-69

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Relation between mechanical and structural properties of silicon-incorporated hard a-C:H films

By Baia Neto A.L.   Santos R.A.   Camargo S.S.J.   Freire F.L.J.   Carius R.   Beyer W.   Finger F.  

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Tribological properties of a-C:H multilayer structures

By Knoblauch-Meyer L.   Hauert R.  

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