Optical emission end point detecting for monitoring oxygen plasma a-C:H stripping

Author: Cescato L.   Alves M.A.R.   Da Silva Braga E.   Fissore A.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.49, Iss.3, 1998-03, pp. : 213-215

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Abstract