Interfacial and structural characteristics of CeO 2 films on silicon with a nitrided interface formed by nitrogen-ion-beam bombardment

Author: Kang J.   Xun K.   Liu X.   Han R.   Wang Y.   Yu D.P.   Lian G.J.   Xiong G.C.   Wu S.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.416, Iss.1, 2002-09, pp. : 122-128

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Abstract