Author: Dultsev F.N. Solowjev A.P.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.419, Iss.1, 2002-11, pp. : 27-32
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Thick SiO x N y and SiO 2 films obtained by PECVD technique at low temperatures
By Alayo M.I. Pereyra I. Carreno M.N.P.
Thin Solid Films, Vol. 332, Iss. 1, 1998-11 ,pp. :