Synthesis and ellipsometric characterization of insulating low permittivity SiO 2 layers by remote-PECVD using radio-frequency glow discharge

Author: Dultsev F.N.   Solowjev A.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.419, Iss.1, 2002-11, pp. : 27-32

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